High phosphorous doped germanium: Dopant diffusion and modeling

TitleHigh phosphorous doped germanium: Dopant diffusion and modeling
Publication TypeJournal Article
Year of Publication2012
AuthorsCai, Y, Camacho-Aguilera, R, Bessette, JT, Kimerling, LC, Michel, J
JournalJournal of Applied Physics
Volume112
Issue3
Date Published2012/08/01/
ISBN Number0021-8979