Germanium-rich silicon-germanium films epitaxially grown by ultrahigh vacuum chemical-vapor deposition directly on silicon substrates

TitleGermanium-rich silicon-germanium films epitaxially grown by ultrahigh vacuum chemical-vapor deposition directly on silicon substrates
Publication TypeJournal Article
Year of Publication2007
AuthorsCannon, DD, Liu, J, Danielson, DT, Jongthammanurak, S, Enuha, UU, Wada, K, Michel, J, Kimerling, LC
JournalApplied Physics Letters
Volume91
Issue25
Date Published2007/12/17/
ISBN Number0003-6951