Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction

TitleFabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction
Publication TypeJournal Article
Year of Publication2001
AuthorsLee, KK, Lim, DR, Kimerling, LC, Shin, J, Cerrina, F
JournalOptics Letters
Volume26
Issue23
Pagination1888 - 1890
Date Published2001/12/01/
ISBN Number0146-9592