Fabrication of silicon nanopillar-based nanocapacitor arrays

TitleFabrication of silicon nanopillar-based nanocapacitor arrays
Publication TypeJournal Article
Year of Publication2010
AuthorsChang, S-W, Oh, J, Boles, ST, Thompson, CV
JournalApplied Physics Letters
Volume96
Issue15
Date Published2010/04/12/
ISBN Number0003-6951