Experimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees

TitleExperimental characterization of the reliability of multi-terminal dual-damascene copper interconnect trees
Publication TypeBook Chapter
Year of Publication2003
AuthorsGan, CL, Thompson, CV, Pey, KL, Choi, WK, Chang, CW, Guo, Q
EditorMcKerrow, AJ, Leu, J, Kraft, O, Kikkawa, T
Book TitleMaterials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics-2003
Volume766
Pagination121 - 126
ISBN Number1-55899-703-2