Experimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees

TitleExperimental characterization of the reliability of 3-terminal dual-damascene copper interconnect trees
Publication TypeBook Chapter
Year of Publication2002
AuthorsGan, CL, Thompson, CV, Pey, KL, Choi, WK, Wei, F, Yu, B, Hau-Riege, SP
EditorVeteran, JL, OMeara, DL, Misra, V, Ho, PS
Book TitleSilicon Materials-Processing, Characterization and Reliability
Volume716
Pagination431 - 436
ISBN Number1-55899-652-4