Experimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees

TitleExperimental characterization and modeling of the reliability of three-terminal dual-damascene Cu interconnect trees
Publication TypeJournal Article
Year of Publication2003
AuthorsGan, CL, Thompson, CV, Pey, KL, Choi, WK
JournalJournal of Applied Physics
Volume94
Issue2
Pagination1222 - 1228
Date Published2003/07/15/
ISBN Number0021-8979