Evolution of stresses in passivated and unpassivated metal interconnects

TitleEvolution of stresses in passivated and unpassivated metal interconnects
Publication TypeJournal Article
Year of Publication1998
AuthorsGouldstone, A, Shen, YL, Suresh, S, Thompson, CV
JournalJournal of Materials Research
Volume13
Issue7
Pagination1956 - 1966
Date Published1998/07//
ISBN Number0884-2914