EVOLUTION OF ELECTROMIGRATION-INDUCED VOIDS IN SINGLE-CRYSTALLINE ALUMINUM LINES WITH DIFFERENT CRYSTALLOGRAPHIC ORIENTATIONS

TitleEVOLUTION OF ELECTROMIGRATION-INDUCED VOIDS IN SINGLE-CRYSTALLINE ALUMINUM LINES WITH DIFFERENT CRYSTALLOGRAPHIC ORIENTATIONS
Publication TypeBook Chapter
Year of Publication1993
AuthorsJOO, YC, Thompson, CV
EditorRodbell, KP, Filter, WF, Frost, HJ, Ho, PS
Book TitleMaterials Reliability in Microelectronics Iii
Volume309
Pagination351 - 356
ISBN Number1-55899-205-7