Evolution of AlN buffer layers on silicon and effects on the properties of epitaxial GaN films

TitleEvolution of AlN buffer layers on silicon and effects on the properties of epitaxial GaN films
Publication TypeBook Chapter
Year of Publication2003
AuthorsZang, KY, Chua, SJ, Wang, LS, Thompson, CV
EditorStutzmann, M
Book Title5th International Conference on Nitride Semiconductors (icns-5), Proceedings
Pagination2067 - 2071
ISBN Number3-527-40489-9