ELECTRONIC PASSIVATION OF SILICON SURFACES BY HALOGENS

TitleELECTRONIC PASSIVATION OF SILICON SURFACES BY HALOGENS
Publication TypeJournal Article
Year of Publication1994
AuthorsMSAAD, H, Michel, J, LAPPE, JJ, Kimerling, LC
JournalJournal of Electronic Materials
Volume23
Issue5
Pagination487 - 491
Date Published1994/05//
ISBN Number0361-5235