ELECTROMIGRATION LIFETIMES OF SINGLE-CRYSTAL ALUMINUM LINES WITH DIFFERENT CRYSTALLOGRAPHIC ORIENTATIONS

TitleELECTROMIGRATION LIFETIMES OF SINGLE-CRYSTAL ALUMINUM LINES WITH DIFFERENT CRYSTALLOGRAPHIC ORIENTATIONS
Publication TypeBook Chapter
Year of Publication1994
AuthorsJOO, YC, Thompson, CV
EditorBorgesen, P, Coburn, JC, Sanchez, JE, Rodbell, KP, Filter, WF
Book TitleMaterials Reliability in Microelectronics Iv
Volume338
Pagination319 - 324
ISBN Number1-55899-238-3