The effects of a thin film dopant precursor on the structure and properties of femtosecond-laser irradiated silicon

TitleThe effects of a thin film dopant precursor on the structure and properties of femtosecond-laser irradiated silicon
Publication TypeJournal Article
Year of Publication2011
AuthorsSmith, MJ, Winkler, M, Sher, M-J, Lin, Y-T, Mazur, E, Gradecak, S
JournalApplied Physics a-Materials Science & Processing
Volume105
Issue4
Pagination795 - 800
Date Published2011/12//
ISBN Number0947-8396