Effects of oblique-angle deposition on intrinsic stress evolution during polycrystalline film growth

TitleEffects of oblique-angle deposition on intrinsic stress evolution during polycrystalline film growth
Publication TypeJournal Article
Year of Publication2014
AuthorsYu, HZ, Thompson, CV
JournalActa Materialia
Volume77
Pagination284 - 293
Date Published2014/09/15/
ISBN Number1359-6454