Effects of active atomic sinks and reservoirs on the reliability of Cu/low-k interconnects

TitleEffects of active atomic sinks and reservoirs on the reliability of Cu/low-k interconnects
Publication TypeJournal Article
Year of Publication2008
AuthorsWei, FL, Hau-Riege, CS, Marathe, AP, Thompson, CV
JournalJournal of Applied Physics
Volume103
Issue8
Date Published2008/04/15/
ISBN Number0021-8979