Effect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees

TitleEffect of current distribution on the reliability of multi-terminal Cu dual-damascene interconnect trees
Publication TypeBook
Year of Publication2003
AuthorsGan, CL, Thompson, CV, Pey, KL, Choi, WK, Chang, CW, Gu, Q
ISBN Number0-7803-7649-8