Effect of current direction on the lifetime of different levels of Cu dual-damascene metallization

TitleEffect of current direction on the lifetime of different levels of Cu dual-damascene metallization
Publication TypeJournal Article
Year of Publication2001
AuthorsGan, CL, Thompson, CV, Pey, KL, Choi, WK, Tay, HL, Yu, B, Radhakrishnan, MK
JournalApplied Physics Letters
Volume79
Issue27
Pagination4592 - 4594
Date Published2001/12/31/
ISBN Number0003-6951