The effect of Al3Ti capping layers on electromigration in single-crystal aluminum interconnects

TitleThe effect of Al3Ti capping layers on electromigration in single-crystal aluminum interconnects
Publication TypeJournal Article
Year of Publication1998
AuthorsSrikar, VT, Thompson, CV
JournalApplied Physics Letters
Volume72
Issue21
Pagination2677 - 2679
Date Published1998/05/25/
ISBN Number0003-6951