Dopant Enhanced Diffusion For High n-type Doped Ge

TitleDopant Enhanced Diffusion For High n-type Doped Ge
Publication TypeJournal Article
Year of Publication2012
AuthorsCai, Y, Camacho-Aguilera, R, Bessette, JT, Kimerling, LC, Michel, J
Secondary AuthorsHarame, D, Krishnamohan, T, Miyazaki, S, Reznicek, A, Tillack, B, Yeo, YC, Caymax, M, Masini, G, Niu, G, Saraswat, K, Vincent, B, Uchida, K
JournalSige, Ge, and Related Compounds 5: Materials, Processing, and Devices
Volume50
Issue9
Pagination263 - 266
Date Published2012///
ISBN Number1938-5862