Diffusional creep in damascene Cu lines

TitleDiffusional creep in damascene Cu lines
Publication TypeJournal Article
Year of Publication2001
AuthorsKobrinsky, MJ, Thompson, CV, Gross, ME
JournalJournal of Applied Physics
Volume89
Issue1
Pagination91 - 98
Date Published2001/01/01/
ISBN Number0021-8979