Diffusion and electromigration of Cu in single crystal Al interconnects

TitleDiffusion and electromigration of Cu in single crystal Al interconnects
Publication TypeBook Chapter
Year of Publication1998
AuthorsSrikar, VT, Thompson, CV
EditorBravman, JC, Marieb, TN, Lloyd, JR, Korhonen, MA
Book TitleMaterials Reliability in Microelectronics Viii
Volume516
Pagination71 - 75
ISBN Number1-55899-422-X