Correlation of shape changes of grain surfaces and reversible stress evolution during interruptions of polycrystalline film growth

TitleCorrelation of shape changes of grain surfaces and reversible stress evolution during interruptions of polycrystalline film growth
Publication TypeJournal Article
Year of Publication2014
AuthorsYu, HZ, Thompson, CV
JournalApplied Physics Letters
Volume104
Issue14
Date Published2014/04/07/
ISBN Number0003-6951