Chemical Mechanical Polishing of Selective Epitaxial Grown Germanium on Silicon

TitleChemical Mechanical Polishing of Selective Epitaxial Grown Germanium on Silicon
Publication TypeJournal Article
Year of Publication2014
AuthorsCai, Y, Yu, W, Kimerling, LC, Michel, J
JournalEcs Journal of Solid State Science and Technology
Volume3
Issue2
PaginationP5 - P9
Date Published2014///
ISBN Number2162-8769