Application of contact theory to metal-metal bonding of silicon wafers

TitleApplication of contact theory to metal-metal bonding of silicon wafers
Publication TypeJournal Article
Year of Publication2007
AuthorsLeong, HL, Gan, CL, Thompson, CV, Pey, KL, Li, HY
JournalJournal of Applied Physics
Volume102
Issue10
Date Published2007/11/15/
ISBN Number0021-8979