Activation energy determination for recrystallization in electroplated-copper films using differential scanning calorimetry

TitleActivation energy determination for recrystallization in electroplated-copper films using differential scanning calorimetry
Publication TypeJournal Article
Year of Publication2003
AuthorsDonthu, SK, Vora, MM, Lahiri, SK, Thompson, CV, Yi, S
JournalJournal of Electronic Materials
Volume32
Issue6
Pagination531 - 534
Date Published2003/06//
ISBN Number0361-5235