Multilayer block copolymer meshes by orthogonal self-assembly

TitleMultilayer block copolymer meshes by orthogonal self-assembly
Publication TypeJournal Article
Year of Publication2016
AuthorsTavakkoli, AKG, Nicaise, SM, Gadelrab, KR, Alexander-Katz, A, Ross, CA, Berggren, KK
JournalNature Communications
Date Published2016/01//

Continued scaling-down of lithographic-pattern feature sizes has brought templated self-assembly of block copolymers (BCPs) into the forefront of nanofabrication research. Technologies now exist that facilitate significant control over otherwise unorganized assembly of BCP microdomains to form both long-range and locally complex monolayer patterns. In contrast, the extension of this control into multilayers or