Vertical etching with isolated catalysts in metal-assisted chemical etching of silicon

TitleVertical etching with isolated catalysts in metal-assisted chemical etching of silicon
Publication TypeJournal Article
Year of Publication2012
AuthorsLianto, P, Yu, S, Wu, J, Thompson, CV, Choi, WK
JournalNanoscale
Volume4
Issue23
Pagination7532 - 7539
Date Published2012///
ISBN Number2040-3364