Synthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching

TitleSynthesis of Silicon Nanowires and Nanofin Arrays Using Interference Lithography and Catalytic Etching
Publication TypeJournal Article
Year of Publication2008
AuthorsChoi, WK, Liew, TH, Dawood, MK, Smith, HI, Thompson, CV, Hong, MH
JournalNano Letters
Volume8
Issue11
Pagination3799 - 3802
Date Published2008/11//
ISBN Number1530-6984