Mortality dependence of Cu dual damascene interconnects on adjacent segment

TitleMortality dependence of Cu dual damascene interconnects on adjacent segment
Publication TypeBook Chapter
Year of Publication2004
AuthorsChang, CW, Gan, CL, Thompson, CV, Pey, KL, Choi, WK, Hwang, N
EditorCarter, RJ, HauRiege, CS, Lu, TM, Schulz, SE
Book TitleMaterials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics-2004
Volume812
Pagination339 - 344
ISBN Number1-55899-762-8