Densely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching

TitleDensely Packed Arrays of Ultra-High-Aspect-Ratio Silicon Nanowires Fabricated using Block-Copolymer Lithography and Metal-Assisted Etching
Publication TypeJournal Article
Year of Publication2009
AuthorsChang, S-W, Chuang, VP, Boles, ST, Ross, CA, Thompson, CV
JournalAdvanced Functional Materials
Volume19
Issue15
Pagination2495 - 2500
Date Published2009/08/10/
ISBN Number1616-301X