Templated self-assembly of Si-containing block copolymers for nanoscale device fabrication

TitleTemplated self-assembly of Si-containing block copolymers for nanoscale device fabrication
Publication TypeJournal Article
Year of Publication2010
AuthorsRoss, CA, Jung, YS, Chuang, VP, Son, JG, Gotrik, KW, Mickiewicz, RA, Yang, JKW, Chang, JB, Berggren, KK, Gwyther, J, Manners, I
Secondary AuthorsHerr, DJC
JournalAlternative Lithographic Technologies Ii
Volume7637
Date Published2010///
ISBN Number0277-786X