| Title | Low temperature direct wafer bonding of GaAs to Si via plasma activation |
| Publication Type | Journal Article |
| Year of Publication | 2013 |
| Authors | Yeo, CY, Xu, DW, Yoon, SF, Fitzgerald, EA |
| Journal | Applied Physics Letters |
| Volume | 102 |
| Issue | 5 |
| Date Published | 2013/02/04/ |
| ISBN Number | 0003-6951 |