Low temperature direct wafer bonding of GaAs to Si via plasma activation

TitleLow temperature direct wafer bonding of GaAs to Si via plasma activation
Publication TypeJournal Article
Year of Publication2013
AuthorsYeo, CY, Xu, DW, Yoon, SF, Fitzgerald, EA
JournalApplied Physics Letters
Volume102
Issue5
Date Published2013/02/04/
ISBN Number0003-6951