Title | Low temperature direct wafer bonding of GaAs to Si via plasma activation |
Publication Type | Journal Article |
Year of Publication | 2013 |
Authors | Yeo, CY, Xu, DW, Yoon, SF, Fitzgerald, EA |
Journal | Applied Physics Letters |
Volume | 102 |
Issue | 5 |
Date Published | 2013/02/04/ |
ISBN Number | 0003-6951 |