Comparison of compressive and tensile relaxed composition-graded GaAsP and (Al)InGaP substrates

TitleComparison of compressive and tensile relaxed composition-graded GaAsP and (Al)InGaP substrates
Publication TypeJournal Article
Year of Publication2010
AuthorsMori, MJ, Boles, ST, Fitzgerald, EA
JournalJournal of Vacuum Science & Technology A
Volume28
Issue2
Pagination182 - 188
Date Published2010/03//
ISBN Number0734-2101