Molecular beam epitaxy growth of metamorphic high electron mobility transistors and metamorphic heterojunction bipolar transistors on Ge and Ge-on-insulator/Si substrates

TitleMolecular beam epitaxy growth of metamorphic high electron mobility transistors and metamorphic heterojunction bipolar transistors on Ge and Ge-on-insulator/Si substrates
Publication TypeJournal Article
Year of Publication2008
AuthorsLubyshev, D, Fastenau, JM, Wu, Y, Liu, WK, Bulsara, MT, Fitzgerald, EA, Hoke, WE
JournalJournal of Vacuum Science & Technology B
Volume26
Issue3
Pagination1115 - 1119
Date Published2008/05//
ISBN Number1071-1023