Materials Integration for III-V/SiGe plus CMOS Integrated Circuit Platforms

TitleMaterials Integration for III-V/SiGe plus CMOS Integrated Circuit Platforms
Publication TypeJournal Article
Year of Publication2012
AuthorsFitzgerald, EA
Secondary AuthorsHarame, D, Krishnamohan, T, Miyazaki, S, Reznicek, A, Tillack, B, Yeo, YC, Caymax, M, Masini, G, Niu, G, Saraswat, K, Vincent, B, Uchida, K
JournalSige, Ge, and Related Compounds 5: Materials, Processing, and Devices
Volume50
Issue9
Pagination1033 - 1037
Date Published2012///
ISBN Number1938-5862